Deposited materials:       
parylene N, C, D, F-VT4

Range of thicknesses:           
0.05 to 50 micrometers

Dimensions:               
width: approx. 2200 mm
depth: approx. 2700 mm
height: approx. 1600 mm

Pryolysis:                         
4 kW / max 850°C

Chamber:                       
diameter: 500 mm
length: 610 mm
Volume: approx. 120 litres

Rotary drum:
diameter: 445 mm
length: 580 mm
Volume: approx. 90 litres  

Cold trap:                       
Liquid N2

Pump system:

dry pump system
pumping speed 1800 m3/h

Ultimate pressure:
1 x 10-3 mbar

Control:
full PC control system,
software based on Windows

Connections:
3 phases/400 V AC at 32 A/50-60 Hz
Compressed Air: 6 bars oil free and dry
Exhaust: 40 mm tube